Canon Launches MPAsp-H1003T Lithography System for 4K Displays

Canon just launched the MPAsp-H1003T, a flat panel display (FPD) lithography system. The display manufacturing solution is capable of resolving 2.0 micrometer Line/Space (L/S) features across Generation 8 glass panels, making one-shot exposure of 65-inch displays possible.

The MPAsp-H1003T claims to increase the yield of mass production of 4K 65-inch panels utilizing Generation 8 glass panels.

Canon FPD lithography systems employ a Reflection Projection Optical System for one-shot exposure and feature a wide-field exposure that enables manufacturing of large panels. Thanks to a newly developed projection optical system and proprietary Canon processing technology, the wide-field MPAsp-H1003T achieves the same 2.0 micrometer L/S resolution as its predecessor model, the MPAsp-H803T released in June 2013.

The MPAsp-H1003T also increases the Canon FPD lithography system maximum area for one-shot exposure of displays from the previous limit of 58 inches to 65 inches, resulting in a 37 percent reduction3 in cycle time for 65-inch display exposure versus previous models.

Along with the demand for higher-resolution patterning for high-definition flat panel displays, pattern overlay accuracy has become an increasingly important part of the manufacturing process. Non-linear (distorted) components are considered the primary cause of diminished overlay accuracy. To mitigate this problem, the MPAsp-H1003T uses a combination of a simultaneous multipoint alignment system and magnification compensation technology to achieve a 10 percent improvement in overlay accuracy compared with previous Canon models.

The MPAsp-H1003T can also employ a dual-inline configuration in which a single coater-developer tool supplies two FPD exposure systems. This Multi-Module on Glass (MMG) processing approach exposes two different-sized display panels on a single glass plate to increase process efficiency and productivity. MPAsp-H1003T systems in an MMG configuration utilizing the MPAsp-H803T make possible optimized Generation 8 glass panel mass production without lengthening cycle times.

See also  Sharp's InfoComm 2019 Booth Is Business as Usual

So, we could see more 4K 65” panels coming quickly! If you’re interested in more, go here.